| 摘要 |
PURPOSE: An apparatus for cleaning a gas supplying unit is provided to reduce maintenance time by using an automated process for maintaining a consistent process. CONSTITUTION: At least one sub case is installed within a main case. A brush removes a foreign substance. A first driving part (280) rotates the sub case. A second driving part (380) rotates the brush. A third driving part (480) drives a main case on a first guide rail. |
