NOUVEAU MATERIAU D'ENDUCTION ANTI-REFLECHISSANT SUPERIEUR POUR LA REDUCTION DE FILIGRANE D'EAU EN PHOTOLITHOGRAPHIE PAR IMMERSION.

摘要

A coating material disposed over a photosensitive layer comprises an acid capable of neutralizing a base quencher from the photosensitive layer; and a polymer that is a carrier of the acid and is insoluble to an immersion fluid used in an immersion lithography process. The acid is chemically bonded to the polymer or mixed to the polymer. The acid is an organic acid comprising a sulfonyl acid group. The polymer comprises fluoride. The coating material is soluble in tetramethylammonium hydroxide (TMAH) solution or cyclohexanol. An independent claim is included for a method for immersion lithography.