ZINC PRECURSORS WITH AMINOTHIOLATE, PREPARATION METHOD THEREOF AND PROCESS FOR THE FORMATION OF THIN FILMS USING THE SAME

摘要

The present invention relates to a zinc precursor represented by a chemical formula 1. The zinc precursor comprises sulfur and has advantages such as eliminating the need for separately adding sulfur while manufacturing a thin film, and forming a high-quality zinc sulfide thin film due to enhanced thermal stability and volatility. [Chemical formula 1] (In the chemical formula, R1 and R2 respectively are a linear alkyl group of C1-C10 or a branched alkyl group of C1-C10, R3 and R4 respectively are a linear alkyl group of C1-C10, a branched alkyl group of C1-C10, or a fluorinated alkyl group of C1-C10, and n is an integer of 1-3)