| 摘要 |
The present invention relates to a lens control apparatus of a transmission electron microscope (TEM) for easily obtaining a PED pattern, which is a lens control apparatus of a TEM that includes: a plurality of electron lenses; and a lens controller which controls a characteristic of power applied to a plurality of alignment coils attached to each electron lens. The lens control apparatus comprises: (A) an electron lens controller which controls a characteristic of power applied to the electron lenses; and (B) an alignment coil controller which controls a current value and a frequency value of power applied to the alignment coils through a power characteristic alignment unit that is connected to the alignment coils. By applying the apparatus of the present invention, it is possible to precisely control a rotational angle and the rotary speed of an electron beam and to display the result of control in the TEM. Thus, a three-dimensional structure of a material can be interpreted in a quick and correct manner once the sample is mounted. |
