| 摘要 |
A transfer robot is provided to remove impurities, remained in the rear of a vacuum pad of a robot arm, and prevent damage of a glass substrate caused by impurities. A robot arm(120) loads or unloads a substrate by sucking the rear of the substrate through a vacuum pad(130a), and has a spray hole(140) for spraying air to the rear of the vacuum pad. A slider(113) moves the robot arm horizontally. A main shaft(112) rotates and moves the slider and the robot arm. A lifter(111) moves the main shaft up and down. A transfer robot main body(110) supports the lifter. |
