| 摘要 |
An image sensor pixel 100 comprises a photoelectric conversion unit 102 supported by a substrate 106; a colour filter 114 disposed over the photoelectric conversion unit 102; and an air gap 422 on a lateral side of said colour filter, wherein a solid structure 134 is provided below the colour filter, the solid structure 134 having an interface with the colour filter 114, such that the interface is tilted towards the colour filter 114, the solid structure 134 acting to anchor the colour filter 114. Also disclosed is a method for producing an image sensor pixel 100, wherein a colour filter 114 is formed over a substrate, laterally adjacent to a wall, wherein the wall 134 is partially removed to define an air gap 422, wherein a portion of an interface between the colour filter 114 and the wall 134 is tilted towards the colour filter 114. The air interface improves the internal reflection of the cascaded light guide 130. The cascaded light guide 130 includes the self-aligned colour filter 114 having air-gaps 422 between adjacent colour filters. The concave air gap 422 interface diverges light that crosses the concave surface into the air gap 422 away from the air gap 422 into adjacent colour filters. These characteristics of the light guide eliminate the need for a microlens. |
