| 摘要 |
A substrate support pin assembly is provided to recycle a substrate mount by preventing a pin head from protruding from an upper surface of the substrate mount. A substrate support pin assembly includes a substrate support pin(15), a pin guide(16), and a holding ring(20). The substrate support pin comprises a main body and a pin head. The pin head has a diameter greater than that of the main body. The substrate support pin penetrates a pin hole of the substrate receiving member. The pin guide is installed inside the pin hole of the substrate receiving member. The body of the substrate support pin penetrates the pin guide. The holding ring is implemented on the pin guide inside the pin hole. The main body of the substrate support pin penetrates the holding ring. |
