发明名称 |
DEVICE FOR GENERATING PLASMA BY MEANS OF MICROWAVES |
摘要 |
A device is provided for generating plasma by microwaves for CVD coating a substrate having a vacuum container into which a reaction gas can be fed and an electrical conductor arranged therein which is connected on each of both ends thereof to a device for coupling microwaves and to a voltage source with which a difference of potential can generated between the electrical conductor and the surrounding vacuum container. The electrical conductor is electrically insulated from the devices for coupling microwaves. The electrical conductor has a rod-shaped design or a curved run. The electrical conductor is connected to the voltage source via a feedthrough filter. The device for coupling microwaves expands in a funnel shape toward the electrical conductor and is partially or completely filled by a dielectric material. The device for coupling microwaves has groove-shaped recesses running along a circumference. |
申请公布号 |
KR20130127357(A) |
申请公布日期 |
2013.11.22 |
申请号 |
KR20127015107 |
申请日期 |
2010.11.05 |
申请人 |
ROTH & RAU AG |
发明人 |
MUEGGE HORST;BAUMGAERTNER KLAUS MARTIN;KAISER MATHIAS;ALBERTS LUKAS |
分类号 |
H01J37/32 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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