| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor capable of downsizing a frame while protecting gauge resistor formation surfaces.SOLUTION: Two sensor chips (11, 12) respectively include diaphragms (23, 33) and gauge resistors (24, 34) formed on surfaces (20, 30) opposed to a recess and are arranged so that the gauge resistor formation surfaces are opposed to each other. A spacer (13) is formed between the gauge resistor formation surfaces of the sensor chips and has a through hole (40) formed correspondingly to the diaphragms. Respective sensor chips and the spacer are airtightly joined with each other in a peripheral part of the through hole and a standard pressure chamber (50) including the gauge resistor formation surfaces of the two sensor chips and a through hole wall surface of the spacer is formed. Differential pressure diaphragms (23a, 33a) oppositely arranged through the same through hole are included as diaphragms and a differential pressure standard pressure chamber (50a) common to the pair of oppositely arranged differential pressure diaphragms is included as the standard pressure chamber. |
