| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid composition used for etching of a multilayer film containing copper and molybdenum.SOLUTION: A liquid composition includes (A) a peroxosulfuric acid ion supply source, (B) a copper ion supply source, and (C) at least one nitrogen compound supply source selected from the group consisting of ammonia, ammonium ion, amine and alkyl ammonium ion, and has a pH of 3.5-9. |
