发明名称 ELEMENT FOR FAST MAGNETIC BEAM DEFLECTION
摘要 A deflector system for fast magnetic deflection of a charged particle beam is described. The deflector system includes a tube for separating the beam from the magnetic deflector coil arrangement, the tube having a middle section, at least a first end section, and a second end section, wherein a wall thickness of the middle section is lower than a wall thickness of at least one of the first end section and the second end section.
申请公布号 US2013306863(A1) 申请公布日期 2013.11.21
申请号 US201313895576 申请日期 2013.05.16
申请人 ADAMEC PAVEL;SALVESEN CARLO;ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR HALBLEITERPRUFTECHNIK GMBH 发明人 ADAMEC PAVEL;SALVESEN CARLO
分类号 H01J37/141 主分类号 H01J37/141
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