发明名称 Co/Ni Multilayers with Improved Out-of-Plane Anisotropy for Magnetic Device Applications
摘要 A MTJ for a spintronic device is disclosed and includes a thin seed layer that enhances perpendicular magnetic anisotropy (PMA) in an overlying laminated layer with a (Co/X)n or (CoX)n composition where n is from 2 to 30, X is one of V, Rh, Ir, Os, Ru, Au, Cr, Mo, Cu, Ti, Re, Mg, or Si, and CoX is a disordered alloy. The seed layer is preferably NiCr, NiFeCr, Hf, or a composite thereof with a thickness from 10 to 100 Angstroms. Furthermore, a magnetic layer such as CoFeB may be formed between the laminated layer and a tunnel barrier layer to serve as a transitional layer between a (111) laminate and (100) MgO tunnel barrier. The laminated layer may be used as a reference layer, dipole layer, or free layer in a MTJ. Annealing between 300� C. and 400� C. may be used to further enhance PMA in the laminated layer.
申请公布号 US2013307101(A1) 申请公布日期 2013.11.21
申请号 US201313955039 申请日期 2013.07.31
申请人 MAGIC TECHNOLOGIES, INC. 发明人 JAN GUENOLE;TONG RU-YING;WANG YU-JEN
分类号 H01L43/02 主分类号 H01L43/02
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