发明名称 OPTICAL CHARACTERISTIC MEASURING APPARATUS AND OPTICAL CHARACTERISTIC MEASURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an optical characteristic measuring apparatus capable of accelerating measurement.SOLUTION: In an optical characteristic measuring apparatus 1, a support unit 4 supports a sample S by being brought into contact with a plurality of mutually separated points on a lower surface of the plate-like sample S. A lifting unit 5 includes one or more holding heads 52 allowed to be moved to the supported sample S, brings the holding head 52 into contact with the vicinity of a measuring point of the sample S and generates contact pressure between the holding head 52 and the sample S. A light projection unit 6 irradiates the measuring point of the sample S with light in a state that the contact pressure is generated between the holding head 52 and the sample S. A light receiving unit 7 receives light transmitted through the measuring point of the sample S.
申请公布号 JP2013234934(A) 申请公布日期 2013.11.21
申请号 JP20120108023 申请日期 2012.05.09
申请人 OTSUKA DENSHI CO LTD 发明人 DODA TOMOHIRO;NAKAMURA KENJI;MURAMOTO YASUNORI;YOKOTA HIDEAKI
分类号 G01M11/00 主分类号 G01M11/00
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