发明名称 p-TYPE SEMICONDUCTOR MATERIAL AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an oxide semiconductor material having p-type conductivity, and to provide a semiconductor device using the oxide semiconductor material.SOLUTION: An oxide semiconductor material having p-type conductivity can be formed using a molybdenum oxide material containing molybdenum oxide (MoO(2<y<3)) having an intermediate composition between molybdenum dioxide and molybdenum trioxide. For example, a semiconductor device is formed using a molybdenum oxide material containing molybdenum trioxide (MoO) as its main component and MoO(2<y<3) at 4% or more.
申请公布号 JP2013234106(A) 申请公布日期 2013.11.21
申请号 JP20130025334 申请日期 2013.02.13
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 ASAMI YOSHINOBU;KATAISHI RIHO;KIKUCHI ERUMU
分类号 C01G39/02;H01L29/861;H01L29/868;H01L31/04 主分类号 C01G39/02
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