| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect very small pressure fluctuation, to set the lower limit frequency of the pressure fluctuation to a desired value, and to optionally set the frequency band of the detectable pressure fluctuation.SOLUTION: A pressure sensor for detecting the pressure fluctuation of a predetermined frequency band includes a sensor body 3 having a cavity 10 formed therein, a cantilever 4 disposed inside a communication opening 11 in the state of being supported in cantilever in the sensor body and distorted to be deformed according to a pressure difference between the inside and the outside of the cavity, a displacement measuring part for measuring displacement of the cantilever. A gap 13 is formed between the outer peripheral edge of the cantilever and the opening end of the communication opening, and a lower limit frequency f(Hz) in the frequency band is set by the following expression (1): [f>k (G/V). [k is proportional constant, G is a gap width (μm), and V is cavity volume (ml).] |
