| 摘要 |
PROBLEM TO BE SOLVED: To provide an examination method and an examination apparatus capable of preventing a product from being determined as a defective product although it is a non-defective product.SOLUTION: An examination apparatus comprises: an examination object image capturing device 5; matching degree calculation means 23 which calculates a degree of matching between an image pattern and a model pattern; examination object entire retrieval means 24 which positions the model pattern in an image position of the highest degree of matching between the model pattern and the image pattern; reference position application means 25 which determines a reference position of the model pattern for each element on an image; model pattern dividing means 26 which divides the model pattern for each element; search range setting means 27 which sets a search range around the reference position of each of the elements of the divided model pattern; and retrieval object individual retrieval means 28 which determines an element of the image pattern having the highest degree of matching with each of the elements of the model pattern, within the search range, as an element portion of an examination object corresponding to each of the elements of the model pattern. |
