发明名称 CHIP PACKAGE AND METHOD FOR FORMING THE SAME
摘要 Embodiments of the present invention provide a chip package including: a substrate having a first surface and a second surface; a device region located in the substrate; a conducting pad structure disposed on the substrate and electrically connected to the device region; a spacer layer disposed on the first surface of the substrate; a second substrate disposed on the spacer layer, wherein a cavity is created and surrounded by the second substrate, the spacer layer, and the substrate on the device region; and a through-hole extending from a surface of the second substrate towards the substrate, wherein the through-hole connects to the cavity.
申请公布号 US2013307147(A1) 申请公布日期 2013.11.21
申请号 US201313895235 申请日期 2013.05.15
申请人 XINTEC INC. 发明人 LIU CHIEN-HUNG
分类号 H01L23/498;H01L21/78 主分类号 H01L23/498
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