发明名称 PLASMA PROCESSING DEVICE
摘要 Provided is a plasma processing device (S1) configured to perform surface reforming on a workpiece (X) made of a metal material in a vacuum furnace (1) by plasma includes movable power feeding devices (14 and 15) that are movable in the vacuum furnace (1).
申请公布号 US2013305985(A1) 申请公布日期 2013.11.21
申请号 US201213981836 申请日期 2012.02.02
申请人 KATSUMATA KAZUHIKO 发明人 KATSUMATA KAZUHIKO
分类号 C23C16/448 主分类号 C23C16/448
代理机构 代理人
主权项
地址