Micro Viscometers and methods of manufacturing the same

摘要

A viscometer for measuring the viscosity of fluid. The viscometer includes: a first chamber and a second chamber separated from the first chamber; a micro channel connecting the first chamber to the second chamber; a first thin film disposed over the first chamber and a second thin film disposed over the second chamber; and a first piezoelectric film disposed over the first thin film and a second piezoelectric film disposed over the second thin film. At least one of the first and second piezoelectric films has a hexagonal shape if a longest distance between a center and an edge of the piezoelectric film is longer than a threshold range and a circular shape if the distance is shorter than the threshold range.