Rotating Body of Vacuum Pump, Fixed Member Disposed Opposite Rotating Body, and Vacuum Pump Provided with Rotating Body and Fixed Member

摘要

A rotating body of a vacuum pump is partially constituted by a fiber-reinforced plastic and configured to exhaust gas by rotation. A corrosion-resistant layer is provided on the fiber-reinforced plastic portion which is the base material of the rotating body. A high-emissivity layer having a higher emissivity than the corrosion-resistant layer is provided on the corrosion-resistant layer. Fixed members facing the rotating body of the vacuum pump are each provided with a high-emissivity layer having a higher emissivity than the base material of the fixed members on the surfaces facing the fiber-reinforced plastic portion of the rotating body.