| 摘要 |
PROBLEM TO BE SOLVED: To provide a gyro sensor for efficiently vibrating a vibrating body.SOLUTION: In a gyro sensor 100, a sensor substrate 110 includes a fixing part 10 coupled to at least one of a first substrate 120 and a second substrate 130, a movable body 30 that is connected to the fixing part 10 via an elastic part 20 and, according to the angular velocity with a second axis orthogonal to a first axis as the axis, can be displaced in the direction of a third axis orthogonal to the first axis and the second axis, and a fixed detection electrode part 40. The movable body 30 includes a support part 32 connected to the elastic part 20, a vibrating body 36 that is supported by the support part 32, and vibrates in the first axis direction by a first driving electrode part 50a and a second driving electrode part 52b, and a movable detection electrode part 38 supported by the support part 52, and facing the fixed detection electrode part 40. The distance between the vibrating body 36 and first driving electrode part 50a and the distance between the vibrating body 36 and second driving electrode part 52b are the same. |
