PATTERN TRANSFER APPARATUS AND PATTERN TRANSFER METHOD

摘要

PROBLEM TO BE SOLVED: To provide a pattern transfer technique capable of excellently performing pattern transfer to a substrate.SOLUTION: In a pattern transfer technique, a substrate SB whose pattern transfer surface is adhered to a pattern layer formed on a carrier BL is moved in a separation direction separating from the carrier BL to transfer the pattern layer onto the pattern transfer surface. In a state in which the substrate SB is sucked and held by a plurality of suction means 35 arranged in a predetermined arrangement direction oppositely to a surface to be sucked on the side opposite to the pattern transfer surface of the substrate SB, the movement of each of the suction means 35 is started in the separation direction according to the arrangement order from the suction means 35 located at one end in the arrangement direction to the suction means 35 located at the other end in the arrangement direction.