| 摘要 |
In this lasing device, when the lasing device is activated from an idle state, a resident gas inside a gas circulation path and an optical resonator is discharged from a gas discharge valve, which has been opened by a gas pressure controller. During a time interval calculated by an open time calculator from the immediately preceding idle time of the lasing device, a laser medium gas present inside the line between a laser medium gas supply and a gas supply valve is discharged, together with the resident gas, through the gas supply valve which has been opened by the gas pressure controller. The number of valves used is decreased thereby, reducing costs, as well as minimizing consumption of the laser medium gas. |
