| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a liquid ejection head that can accurately control size of an opening of the surface side of the independent supply port.SOLUTION: A method for producing a liquid ejecting head includes: (1) a step of forming an etching stop layer on a part corresponding to a region in which an independent supply port is formed, on a first face of a substrate; (2) a step of conducting dry etching treatment for the substrate from a second face side until the etched part reaches the etching stop layer; and (3) a step of removing the etching stop layer by isotropic etching to form the independent supply port, after having conducted the dry etching treatment, wherein the isotropic etching is conducted in such a state that a side etching stopper part having etching resistance to the isotropic etching is formed in the side face perimeter of the etching stop layer. |
