摘要 |
PROBLEM TO BE SOLVED: To provide a photoacid generator-containing composition that contains a water soluble photoacid generator, and a photosensitive composition etc. using the same.SOLUTION: An embodiment contains 80 mass% or more of water, and 0.1 mass% or more of an onium salt dissolved in the water, where the onium salt is a sulfonium salt represented by the specified general formula (I). In the formula: Rto Reach independently represent either a group selected from among an alkyl group, an alkenyl group, an alkynyl group, an aryl group, a monovalent heterocyclic group, a carboxyl group and an acyl group, or a group selected from among an alkylene group and a divalent heterocyclic group which are substituted with these groups; Rand R, Rand R, Rand R, and Rand Rmay each be linked with each other to form a ring; L represents a divalent linking group; Xrepresents an anion; and t represents an integer in the range from 1 to 10. |