发明名称 |
WAFER-LEVEL PACKAGING MECHANISMS |
摘要 |
The embodiments of mechanisms of wafer-level packaging (WLP) described above utilize a planarization stop layer to determine an end-point of the removal of excess molding compound prior to formation of redistribution lines (RDLs). Such mechanisms of WLP are used to implement fan-out and multi-chip packaging. The mechanisms are also usable to manufacture a package including chips (or dies) with different types of external connections. For example, a die with pre-formed bumps can be packaged with a die without pre-formed bumps.
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申请公布号 |
US2013307143(A1) |
申请公布日期 |
2013.11.21 |
申请号 |
US201213539229 |
申请日期 |
2012.06.29 |
申请人 |
LIN JING-CHENG;HUNG JUI-PIN;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
LIN JING-CHENG;HUNG JUI-PIN |
分类号 |
H01L23/498;H01L21/56 |
主分类号 |
H01L23/498 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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