| 摘要 |
An optical system includes a first optical group configured to form, at a first intermediate image plane, a first intermediate image of an object disposed at an object plane; a second optical group and a third optical group configured to form, at an image plane, a final image of the object based on the first intermediate image. The first optical group consists of a solid lens having a first surface and a concave second surface facing the first surface; the solid lens is configured to collect light originated at the object and to reflect thereinside at least twice the collected light. The second optical group includes at least one mangin mirror and the third optical group includes a plurality of lenses. The first, second and third optical groups can appropriately control axial chromatic aberration and Petzval curvature, so that imaging with high NA illumination may be performed.
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