发明名称 SUPERIMPOSING APPARATUS AND SUPERIMPOSING METHOD
摘要 <p>A superimposing apparatus is provided with a temporary bonding unit (24) that temporarily bonds a support plate (41) to a substrate (42) by pressing a portion of the support plate (41) that is superimposed on the substrate (42) against the substrate (42) while heating that portion.</p>
申请公布号 WO2013172184(A1) 申请公布日期 2013.11.21
申请号 WO2013JP62381 申请日期 2013.04.26
申请人 TOKYO OHKA KOGYO CO., LTD. 发明人 INAO, YOSHIHIRO;KATO, SHIGERU
分类号 H01L21/683;H01L21/02 主分类号 H01L21/683
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