| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for collecting an organic metal compound that is stable and unreacted as a form suitable for reproduction, by a simple method, and to provide a method of collecting the organic metal compound using the device.SOLUTION: In a device for collecting an organic metal compound exhausted from a compound semiconductor manufacturing device, a semiconductor manufacturing device is configured by sequentially connecting: an organic metal compound supply device; the compound semiconductor manufacturing device depositing a compound semiconductor on a substrate by using the organic metal compound supplied from the supply device; a collector device collecting an unreacted organic metal compound exhausted from the manufacturing device; and a gas discharge part exhausting a gas from which the unreacted metal compound is collected into the air. The collector device includes an amine compound therein, and has such a structure that the gas exhausted from the compound semiconductor manufacturing device passes in the amine compound. |
