| 摘要 |
PROBLEM TO BE SOLVED: To reduce an effect of an atmosphere fluctuation to detect a surface position of a surface to be inspected with high accuracy.SOLUTION: A surface position measuring device comprises: a first surface position measuring system for receiving a first measuring beam projected to a surface to be inspected positioned on a principal surface or the vicinity of the principal surface from an oblique direction and reflected by the surface to be inspected, to detect a surface position of a first measuring region irradiated with the first measuring beam; and a second surface position measuring system for receiving a second measuring beam projected to the surface to be inspected from an oblique direction and reflected by the surface to be inspected, to detect a surface position of a second measuring region irradiated with the second measuring beam. A first region as a region in which the first measuring beam occupies on the principal surface, and a second region as a region in which the second measuring beam occupies on the principal surface are positioned along a first direction on the principal surface. When a direction perpendicular to the first direction on the principal surface is defined as a second direction, a part of projection of the first region to the second direction and a part of projection of the second region to the second direction are overlapped with each other. |
