| 摘要 |
PROBLEM TO BE SOLVED: To provide an ozone generating apparatus capable of achieving easily miniaturization, height lowering, or voltage reduction of a driving voltage, and simplifying manufacturing steps, and to provide a method for manufacturing the same.SOLUTION: An ozone generating apparatus 1 includes a substrate 2, electrode formation parts 22A, 22B, discharge holes 21A, 21B, 21C, and driving electrodes 3A, 3B. The substrate 2 has a first main surface 2a, and a second main surface 2b facing to the first main surface 2a, and comprises a dielectric. The electrode formation parts 22A, 22B comprise recessed parts provided on the first main surface 2a of the substrate 2. The discharge holes 21A, 21B, 21C comprise through holes provided on the substrate 2, and have openings on the first main surface 2a and the second main surface 2b respectively, and are positioned between the electrode formation parts 22A, 22B. The driving electrodes 3A, 3B are provided inside the electrode formation parts 22A, 22B. |
