发明名称 |
METHOD AND APPARATUS FOR ADJUSTING OPERATING PARAMETERS OF A VACUUM PUMP ARRANGEMENT |
摘要 |
<p>A method for adjusting operating parameters of a vacuum pump arrangement includes determining characteristics of a gas flowing through the vacuum pump arrangement; and setting operating parameters of the vacuum pump arrangement based on the determined characteristics of the first gas. A controller can be configured to perform the method for adjusting the operating parameters of the vacuum pump arrangement in accordance with the characteristics of the gas.</p> |
申请公布号 |
WO2013171454(A1) |
申请公布日期 |
2013.11.21 |
申请号 |
WO2013GB51025 |
申请日期 |
2013.04.23 |
申请人 |
EDWARDS LIMITED |
发明人 |
TURNER, NEIL;TATTERSALL, JACK RAYMOND |
分类号 |
F04C25/02;F04D19/04 |
主分类号 |
F04C25/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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