| 摘要 |
PROBLEM TO BE SOLVED: To provide an autofocus device that enables a stable, accurate and quick focus adjustment, and to provide a microscope including the autofocus device.SOLUTION: The autofocus device comprises: an objective lens system 11 that condenses a light flux from a specimen S; a structuring pupil 14 that includes a plate-shape member 14a provided at a position almost conjugate to a position of an exit pupil position of the objective lens system 11 and blocking the light flux from the objective lens system 11, a plurality of apertures 14h of the plate-shape member 14a and filters 14r, 14b and 14g attached to the plurality of apertures 14h and transmitting only predetermined color components; an imaging lens system 15 that images a light flux transmitted through each filter on an imaging element 16; and a focus position detection part 17 that processes and analyzes image data acquired from the first imaging element 16 and detects a focus position. The focus position detection part 17 acquires from the first imaging element 16 an image based on the light flux transmitted through each filter and separated into a plurality of different color components and detects a focus position of the objective lens system 11 from how these images are overlapped. |
