POWDER PARTICLE COATING USING ATOMIC LAYER DEPOSITION CARTRIDGE

摘要

It is desirable to coat small particles with thin coatings to alter the surface properties of these particles, while maintaining their bulk properties. The ALD technique is an interesting application for this purpose. The invention provides a method that includes receiving an atomic layer deposition (ALD) cartridge (110) into a receiver of an ALD reactor (121) by a quick coupling method. Due to this feature, it can be attained that conduits inside the reactor and cartridge are in alignment with each other. Said ALD cartridge is configured to serve as an ALD reaction chamber, and the method comprises processing surfaces of particulate material within said ALD cartridge by sequential self-saturating surface reactions. The invention also pertains to an ALD reactor, an ALD cartridge and to an apparatus, which contains the reactor and the cartridge.