| 摘要 |
PROBLEM TO BE SOLVED: To provide a protective member capable of surely sticking an annular adhesive layer in which a protective tape is provided thereon, to an outer periphery of a wafer, and a protective tape sticking method.SOLUTION: A protective member is for protecting a protective tape having an annular adhesive layer having a diameter corresponding to that of a wafer and arranged on only a periphery corresponding to a periphery of the wafer on its surface. The protective member comprises: a belt-like sheet which has an area being larger than that of the protective tape and in which an adhesive layer having adhesive power being weaker than that of the annular adhesive layer is provided on a surface; and a belt-like release paper having the same area as that of the belt-like sheet. A back surface of the protective tape adheres to a surface of the belt-like sheet at predetermined intervals, the belt-like release paper is arranged on the annular adhesive layer arranged on surfaces of a plurality of protective tapes adhered on the surface of the belt-like sheet, and the belt-like sheet, a plurality of protective tapes and the belt-like release paper are wound into a roll. |
