| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of producing a thin film capable of suppressing wraparound of a film effectively while forming a seal layer by using an ALD method, and to provide a method of manufacturing a display panel, and a method of manufacturing a TFT substrate.SOLUTION: The method of producing a thin film includes a mask arrangement step for arranging a mask 310 so that a thin film formation planned site A213, where a second seal layer 213 which is a thin film on a second buffer layer 211 is to be formed, is exposed above the buffer layer 211, a reductive plasma processing step for performing reductive plasma processing of the thin film formation planned site A213 following to the mask arrangement step, and a TMA exposure step for exposing the thin film formation planned site A213 to TMA following to the reductive plasma processing step. |
