MICRO-VISCOMETER AND MANUFACTURING METHOD FOR PRODUCING SAME

摘要

Embodiments provide a micro-viscometer, which comprises: first and second chambers spaced apart from each other; a micro-channel connecting the first and second chambers to each other; first and second thin films disposed on the first and second chambers, respectively; and first and second piezoelectric thin films disposed on the first and second thin films, respectively, wherein at least one of the first and second piezoelectric thin films has a hexagonal shape if a distance between the center of the piezoelectric thin film and an end of the piezoelectric thin film is greater than the longest critical distance, or has a circular shape if the distance is less than longest critical distance.