METHOD AND APPARATUS FOR MEASURING 3D SHAPE OF THE OBJECT USING MUTIPLE WAVELENGTHS

摘要

Disclosed is a method for measuring a 3D shape comprises the following steps of: separating beams by spatially separating and radiating light with two or more different wavelengths; scanning by scanning and radiating the beams on an object to be measured; collecting reflected beams from the object to be measured, separating the beams according to wavelength, and detecting the beams; and analyzing a 3D shape of the object to be measured from the detected information by a detection optical unit. In addition, an apparatus for measuring a 3D shape comprises a beam separation optical unit which separates beams by spatially separating and radiating light with two or more different wavelengths; a scanning optical unit which scans and radiates the beams on an object to be measured; a detection optical unit which collects reflected beams from the object to be measured, separates the beams according to wavelength, and detects the beams; and a signal processing unit which analyzes a 3D shape of the object to be measured from the detected information by the detection optical unit. [Reference numerals] (170) Signal processing unit