| 摘要 |
PROBLEM TO BE SOLVED: To provide a camera coping with vacuum environment in terms of a camera that images the inside of vacuum environment and outputs its image, the camera being able to check the presence or absence of a leak (gas leak) from the camera installed in the vacuum environment.SOLUTION: A camera 4a coping with vacuum environment has a structure to which a leak check port 19a is attachable for introducing leak check gas to a camera interior 17 (into a housing) from the outside of a processing chamber 1, which is a vacuum environment. In regular use, the sealability of the camera is ensured by attaching a gas introduction port blocking plate 18a, which blocks an attaching part for the leak check port 19a. In leak check, the leak check port 19a is attached such that the camera interior 17 can be connected to the outside of the processing chamber 1. Accordingly, leak check gas can be conveyed into the camera interior 17 from a gas introduction part 20 outside the processing chamber 1. |
