发明名称 METHOD FOR MOLECULAR BONDING OF SILICON AND GLASS SUBSTRATES
摘要 The present invention concerns a method for bonding a first substrate having a first surface to a second substrate having a second surface. This method includes the steps of holding the first substrate by at least two support points, positioning the first substrate and the second substrate so that the first surface and the second surface face each other, deforming the first substrate by applying between at least one pressure point and the two support points a strain toward the second substrate, bringing the deformed first surface and the second surface into contact, and progressively releasing the strain to facilitate bonding of the substrates while minimizing or avoiding the trapping of air bubbles between the substrates.
申请公布号 US2013309841(A1) 申请公布日期 2013.11.21
申请号 US201313953679 申请日期 2013.07.29
申请人 SOITEC 发明人 KERDILES SEBASTIEN;DELPRAT DANIEL
分类号 H01L21/02 主分类号 H01L21/02
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