发明名称 |
METHOD FOR FORMING REACTION DEVELOPMENT IMAGE AND COMPOSITION THEREFOR |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a reaction development image capable of obtaining sufficient photoresist by forming a film (photoresist layer) using a polylactic acid-based resin and a photoacid generating agent, irradiating ultraviolet rays to the photo-resist layer with a desired pattern and then developing an image using aqueous solution containing no organic solvents as a developer.SOLUTION: Sufficient photoresist can be obtained by using a developer aqueous solution containing no organic solvents and using a compound which has both a quinonediazide structure having a photosensitive function and a hydroxyl group as a photoacid generating agent. There is provided a method for forming a reaction development image by irradiating ultraviolet rays to a photoresist layer with a desired pattern and then washing the layer with an aqueous solution containing an inorganic alkali represented by MOH (wherein M represents an alkali metal), wherein the photo-resist layer is composed of a polylactic acid-based resin and a compound (photoacid generating agent) which has both an organic group having a quinonediazide structure and a hydroxyl group. |
申请公布号 |
JP2013235175(A) |
申请公布日期 |
2013.11.21 |
申请号 |
JP20120108299 |
申请日期 |
2012.05.10 |
申请人 |
YOKOHAMA NATIONAL UNIV |
发明人 |
OYAMA TOSHIYUKI;KAWADA TETSUYA |
分类号 |
G03F7/023;G03F7/32;H01L21/027;H05K3/28 |
主分类号 |
G03F7/023 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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