| 摘要 |
A system and method for imaging the characteristics of an object (2) having at least a first (2a) and a second (2b) layer. The object (2) is illuminated by means of incident light (4), and light (5b) reflected from the object (2) is detected by means of an imaging sensor (6) in which the detected light is converted into electrical charges, according to which a representation of the object (2) is created. Information on light scattered (5a) in the first layer (2a) and the second layer (2b) of the object (2) is obtained from the representation and this information is compared to stored information in order to detect defects on the object (2). |
