发明名称 TRENCH ISOLATION TRANSISTOR WITH GROUNDED GATE FOR A 4.5F2 DRAM CELL AND MANUFACTURING METHOD THEREOF
摘要 An isolation transistor having a grounded gate is formed between a first access transistor construction and a second access transistor construction to provide isolation between the access transistor constructions of a memory device. In an embodiment, the access transistor constructions are recess access transistors. In an embodiment, the memory device is a DRAM. In another embodiment, the memory device is a 4.5F2 DRAM cell.
申请公布号 KR101331748(B1) 申请公布日期 2013.11.20
申请号 KR20087001926 申请日期 2006.06.21
申请人 发明人
分类号 H01L21/765;H01L21/8242;H01L27/108 主分类号 H01L21/765
代理机构 代理人
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