TEST DEVICE OF SEMICONDUCTOR DEVICE, TEST SYSTEM OF SEMICONDUCTOR DEVICE AND METHOD FOR TESTING SEMICONDUCTOR DEVICE

摘要

The present technology is for more accurately detecting the connection between multiple connection parts and multiple interface pads. A test device of a semiconductor device including interface pads according to the present invention comprises multiple connection parts to be connected to the interface pads; a channel connected to the connection parts; a voltage generation part generating a test voltage to be applied to the channel; and a current detection part detecting a current flowing through the channel in response to the test voltage. [Reference numerals] (110) Voltage generation part;(120) Current detection part;(130) Result analysis part