发明名称 A method of wafer-scale integration of semiconductor devices and semiconductor device
摘要 The method of wafer-scale integration of semiconductor devices comprises the steps of providing a semiconductor wafer (1), a further semiconductor wafer (2), which differs from the first semiconductor wafer in at least one of diameter, thickness and semiconductor material, and a handling wafer (3), arranging the further semiconductor wafer on the handling wafer, and bonding the further semiconductor wafer to the semiconductor wafer. The semiconductor device may comprise an electrically conductive contact layer (6) arranged on the further semiconductor wafer (2) and a metal layer connecting the contact layer with an integrated circuit.
申请公布号 EP2665096(A1) 申请公布日期 2013.11.20
申请号 EP20120168069 申请日期 2012.05.15
申请人 AUSTRIAMICROSYSTEMS AG 发明人 CASSIDY, CATHAL;SIEGERT, JOERG;SCHRANK, FRANZ
分类号 H01L27/146 主分类号 H01L27/146
代理机构 代理人
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