| 摘要 |
The present invention relates to a roll-to-roll sputtering apparatus, and, more specifically, to the roll-to-roll sputtering apparatus forming a deposited film on a flexible substrate with a sputtering deposition method. The present invention provides the roll-to-roll sputtering apparatus including: a transferring part on which a cooling drum or multiple rollers are mounted to be detachably attached; and a sputter being placed around the transferring part and sputtering target material on one side of the flexible substrate transferred by the transferring part. |
