发明名称 |
SOURCE SUPPLYING UNIT, METHOD FOR SUPPLYING SOURCE, AND THIN FILM DEPOSITING APPARATUS |
摘要 |
Provided are a source supplying unit and a method for supplying a source. The source supplying unit includes a pot configured to store a source material, an injector communicating with the pot to inject the source material evaporated from the pot, a high frequency coil part surrounding an outside of the pot, and a resistance-type heating part disposed at an outside of the injector. Since a high frequency induction heating method and a resistance-type heating method are combined to evaporate a source material to be supplied, a large amount of source material can be used, and the thickness and quality of a thin film can be easily controlled.
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申请公布号 |
EP2412005(A4) |
申请公布日期 |
2013.11.20 |
申请号 |
EP20100756370 |
申请日期 |
2010.03.26 |
申请人 |
SNU PRECISION CO., LTD. |
发明人 |
BAE, KYUNG BIN;RHO, JUN SEO;CHO, WHANG SIN;KWON, JIN HAON;LEE, JONG HA;KIM, YOU HYUN;YOON, HYUNG SEOK |
分类号 |
H01L21/203 |
主分类号 |
H01L21/203 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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