发明名称 Apparatus to plate substrate and system having the same
摘要 PURPOSE: A substrate plating apparatus and a system for plating substrates with the same are provided to improve plating efficiency by directly performing a plating process after pre-wetting. CONSTITUTION: A system for plating substrates comprises a device frame (10), a plurality of plating devices (100), and a wetting device (200). The device frame comprises a plurality of divided spaces. The plurality of plating devices is placed in the divided spaced, and performs a plating process. The pre-wetting device is placed in the divided space and pre-wets the substrates before the plating process. The device frame comprises a plurality of unit frames, and walls are detachably connected to joint parts between the unit frames.
申请公布号 KR101331726(B1) 申请公布日期 2013.11.20
申请号 KR20120026425 申请日期 2012.03.15
申请人 发明人
分类号 C25D7/12;C25D17/00;C25D19/00 主分类号 C25D7/12
代理机构 代理人
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