| 摘要 |
PURPOSE: A semiconductor manufacturing facility is provided to improve the yield of a semiconductor device by maintaining a receiving box with a pure state. CONSTITUTION: A receiving box(20) accepts a plurality of wafers. The receiving box for accepting the plurality of wafers is loaded on a load port(120). A wafer transfer part(130) transfers the plurality of wafers between the load port and a work processing part. The wafer transfer part comprises a transporting robot(132) and a transfer chamber(131). The transfer chamber provides a transfer space. The transporting robot transfers the plurality of wafers. A container cleaning part(140) washes the receiving box transferred from the load port. A cleaning nozzle sprays cleaning solution to the empty receiving box. |
