METHOD FOR FABRICATING WIRE GRID POLARIZER AND WIRE GRID POLARIZER USING THE METHOD THEREOF

摘要

The present invention relates to a method for fabricating a wire grid polarizer and comprises; a step (a) which prepares a substrate in which a conductive layer, a first hard mask layer, and a second hard mask layer are sequentially arranged; a step (b) which forms a patterned resist layer on the second hard mask layer; a step (c) which patterns the second hard mask layer using the patterned resist layer; a step (d) which patterns the first hard mask layer using the patterned second hard mask layer; a step (e) which patterns the conductive layer using the patterned first and second hard mask layers.